Robots and Design’s SCARA Robot transfers 300mm wafers (12”) swiftly and precisely with single/dual arm with 1 or 2 blades. It has a small footprint that allows spaces to be used efficiently in a wide motion range so that 2 ports can be accessible without a transverse axis (3 port is available when the arm is modified). It can be customized upon request (Long SCARA is customizable).
*Options: Linear Track, Mapping Sensor
If you have an interest in SCARA Robot, please contact us.