Cartesian Z-axis Robot
Gantry type
Non-Gantry type
Robots and Design’s Cartesian Z-axis Robot is a combination of Cartesian Z-axis and link structure with two types: Gantry and Non-Gantry type of Z-axis. Handling wafers precisely at high speed can achieve short tack time and increase of throughput. It is also available to use in lower passline.
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