Safe and Reliable System

EFEM (Equipment Front End Module)

RE-2P

RE-3P

RE-4P

Robots and Design's EFEM is a wafer loading module. The three units included in EFEM are Loading (Loadprt- FOUP Opener), Handler (Wafer Transfer Robot), and Pre-aligner. Integrating a pre-aligner with a clean robot results in a small footprint and allows space to be used with great efficiency.

 

Also, a clean robot with an end-effector on a rotary axis operates without a transverse axis contributing to a higher throughput, and the airflow simulation optimizes, ensuring a high level of cleanliness.

Configuration:

  • Loadport (Mapping)

  • Single/Dual Arm Robot

  • Linear Track for Robot Travel

  • Encloser structure

    • Fan Filter Unit

    • Area Sensor

  • System Software

  • System Electrics

  • System Electrics

  • Options:

    • Wafer aligner​

    • Ionization System

    • PIO Sensor

    • RFIP Reader/Wroter

    • Edge Grip Blades Teaching Pendent

If you have an interest in EFEM, please contact us.

Family Site

Application

Robots and Design, Co., Ltd.

CEO: Jin Seog Han

E-801, 700 Pangyo-ro, Bundang-gu, Seongnam-City, Gyunggi-do, Korea (Yatap-dong, Technopark) 13516

COPYRIGHT© 2020 Robots and Design. ALL RIGHT RESERVED