Robots and Design's EFEM is a wafer loading module. The three units included in EFEM are Loading (Loadprt- FOUP Opener), Handler (Wafer Transfer Robot), and Pre-aligner. Integrating a pre-aligner with a clean robot results in a small footprint and allows space to be used with great efficiency.

 

Also, a clean robot with an end-effector on a rotary axis operates without a transverse axis contributing to a higher throughput, and the airflow simulation optimizes, ensuring a high level of cleanliness.