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SMIF (Standard Mechanical Interface)

Robots and Design’s SMIF is an ergonomically designed SMIF-I/O that has pod cassette loading and unloading into a wide variety of 150~200mm wafer processing and metrology tools. It is designed to be adapted for equipment manufacturer applications for vacuum load-lock tools. SMIF-LP provides capability for a wide variety of wafer fab tools and leads the industry in reduced cycle time and footprint.

If you have an interest in SMIF,  please contact us.

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Robots and Design, Co., Ltd.

CEO: Jin Seog Han

E-801, 700 Pangyo-ro, Bundang-gu, Seongnam-City, Gyunggi-do, Korea (Yatap-dong, Technopark) 13516

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