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SMIF (Standard Mechanical Interface)
Robots and Design’s SMIF is an ergonomically designed SMIF-I/O that has pod cassette loading and unloading into a wide variety of 150~200mm wafer processing and metrology tools. It is designed to be adapted for equipment manufacturer applications for vacuum load-lock tools. SMIF-LP provides capability for a wide variety of wafer fab tools and leads the industry in reduced cycle time and footprint.
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