Telescopic WTR

18" Wafer Transfer Robot

Robots and Design’s Telescopic WTR can go up to a 3-step telescopic type robot. When it achieves a vertical stroke at a maximum of 1200 mm, it effectively covers a high work range. It transfers wafers (8”~12”) quickly and precisely with single/dual arm or multi-blade (in clean room, CLASS 1 Cleanliness). There are various end-effectors available: vacuum blade, edge gripper. Also, it can be customized upon request (18” handling WTR is customizable).

 

*Optional: Linear Track, Mapping Sensor

If you have an interest in Telescopic WTR, please contact us.