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FOUP Opener
8" CASSETTE ADAPTOR
12" FOUP (STANDARD)
18" FOUP
12" FOUP WITH N2 PURGE
FOR FOUP CLEANING TOOL
Robots and Design’s FOUP Opener uses the RS-232 communication interface and includes FOUP presence, placement, protrusion sensors, and mapping functions. It is designed for 12” SEMI compliant FOUP, 18” FOUP, MAC FOUP for 12” ring frame wafer individually, and module design for quick service swap-outs.
*Option: adaptor for 8” cassette, RFID, etc.
12” FOUP Opener (ONLY)
Robots and Design’s 12” FOUP Opener is CE, S2, and SEMI compliant and compatible with all SEMI compliant 12” FOUPs. 8” cassette is compatible with optional adaptors. Also, FOUP pinch point protection is included.
*Option: adaptor for 8” cassette, RFID, etc.
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