icons8-home-24.png

Vacuum Robot

Vacuum Robot.jpg

Single Arm

Untitled-3(합성).jpg

Dual Arm

Robots and Design’s Vacuum Robot is used for 1E-6Pa of vacuum environment. It has a servo motor for all axes, and uses magnetic fluid seals. Also, the rotation diameter is minimized, and the extensions are maximized.

Load Lock Chamber

KakaoTalk_Photo_2020-03-06-13-37-15-9.pn

Robots and Design’s Load Lock Chamber is a 2 or 1 shelf pass-through chamber (loading/unloading) with 4 view points. It controls the vacuum when transferring the wafer, which is in/out from vacuum chamber and Atmospheric equipment (EFEM). Also, it has an auto door open structure and wafer slide out detection sensor included. 

TM Chamber

KakaoTalk_Photo_2020-03-06-13-37-15-10.p

Robots and Design’s TM Chamber is a 7 side for 6 Process Modules (PMs), 1 Load Locks Integrated. It is integrated with Vacuum Robot.
It has 6 view points and wafer detection sensor, wafer slide out detection sensor, wafer presence sensor installed. 

Cluster Tool

Cluster Tool.JPG

Robots and Design’s Cluster Tool is up to 7 sides for 5PMs TM Chamber for 300mm wafer. It is a vacuum pumping system. Two slots of L/L chamber, Dual arm Vacuum Robot, 2 wafer pass-through which is Load lock options are included. 2 wafer is with cooling and pre-heat. (26-wafer batch or 13-wafer batch with cooling)

If you have an interest in any of these products, please contact us.